Cz直拉單晶石墨熱場
graphite thermal field for CZ single crystal
直拉單晶爐內使用的石墨部件是一類易耗件,它由各種高純。等靜壓石墨加工而成。例如其中的石墨坩堝及其他石墨部件采用了高純細顆粒結構石墨;石墨加熱器采用了高純各向同性石墨;石墨保溫罩和石墨蓋板采用高純中顆粒結構的石墨。
Graphite parts which are used in Cz silicon crystal growing furnace are consumable parts. They are made of a variety of high-purity, isostatic graphite. For example,graphite crucible and other parts use graphite with high purity and fine grain. Graphite heater is made of high-purity, isostatic graphite. Graphite thermal insulation cover and cover board are made of high purity,medium grain graphite.
具體產品有:保溫筒,加熱器,三瓣坩堝,坩堝托盤,導流筒,石墨電極,電極螺母,切硅棒用石墨墊,隔熱屏,舟皿等。
Products: thermal insulation barrel, heater, three-segment crucible,crucible tray, draft tube, graphite electrode, electrode nut, graphite pad for cutting silicon rods, heat shield, graphite boat, etc.
該用途對石墨的要求 The requirements on graphite
1、高純度 1、High purity
2、細顆粒,勻質的材料結構 2、Fine grain, uniform material structure
3、機械強度高 3、High mechanical strength
4、耐溫度劇變 4、Thermal shock resistance
5、合適的材料電阻 5、Suitable resistance
6、耐腐蝕性 6、Corrosion resistance
7、優(yōu)良的保溫特性 7、Excellent thermal insulation